File:Diffraction pattern variation across pupil.png
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Summary
| Description | The diffraction pattern from a given feature layout varies with illumination, corresponding to different locations in the pupil. These are represented by the different colors in the example. Larger pitches result in more diffraction patterns [1][2]. |
| Date | |
| Source | Power Point |
| Author | Guiding light |
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Licensing
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2020-07-12 11:43:40 | 172 × 149 | Guiding light | |
| 2020-07-12 07:56:50 | 182 × 149 | Guiding light | |
| 2020-07-12 06:36:57 | 182 × 149 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
References
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- ↑ Stochastic Considerations of Multi-Point Source Illumination in Lithography
- ↑ Stochastic Effects from Photon Distribution Entropy in High-k1 EUV Lithography
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 22:45, 20 July 2021 | | 949 × 404 (66 KB) | Guiding light | replaced drawing |
| 01:00, 13 August 2020 |  | 172 × 149 (5 KB) | OgreBot | (BOT): Reverting to most recent version before archival | |
| 01:00, 13 August 2020 |  | 182 × 149 (4 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2020-07-12 07:56:50 by Guiding light | |
| 01:00, 13 August 2020 |  | 182 × 149 (4 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2020-07-12 06:36:57 by Guiding light | |
| 20:23, 11 August 2020 |  | 172 × 149 (5 KB) | MrTransfer | Transferred from en.wikipedia (MTC!) (1.1.0) |
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